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Quick Details

  • Place of Origin: Taiwan
  • Brand Name: Foamtec
  • Model Number: HT4536D-10
  • Feature: Disposable
  • Product Name: Foamtec HT4536D-10 Vacuum Chamber Cleaning Products Scrub Pad
  • Grit Material: Diamond
  • Grit Rating: 360
  • Diameter: 4"
  • Width: 3"
  • Thickness: .078"

Packaging & Delivery

Packaging Details 10pcs/Bag
10Bags/1 Case
Delivery Time 2 months


Product Name

 Foamtec HT4536D-10 Vacuum Chamber Cleaning Products Scrub Pad

Model Number

 HT4536D-10 - 360 Diamond Grit ScrubPad®

Grit Material


Grit Rating


Diameter 4"
Width 3"




 1. For use in PM procedures.

 2. On Process equipment in Wafer Fab, flat panel display, optical component.


 Vacuum Chamber Cleaning ScrubPADS® with 360 Diamond grit abrasive particles for medium duty PM procedures. Ideal for removing medium amounts of process residue from wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Ion Implant, Novellus speed and AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNZ CVD tools.















Metal PartsCeramis PartsQuartz Parts
RefurbishmentProfessional Chamber PM Kits


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