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Quick Details

  • Place of Origin: United States
  • Brand Name: Foamtec
  • Model Number: HT4514D-10
  • Feature: Disposable
  • Product Name: Foamtec HT4514D-10 Vacuum Chamber Cleaning Scrub Pad
  • Grit Material: Diamond
  • Grit Rating: 140
  • Diameter: 4"
  • Width: 3"
  • Thickness: .078"

Packaging & Delivery

Packaging Details: 10pcs/Bag
10Bags/1 Case
Delivery Detail: 2 months

 

Product Name

 Foamtec HT4514D-10 Vacuum Chamber Cleaning Scrub Pad

Model Number

 HT4514D-10 - 140 Diamond Grit ScrubPad®

Grit Material

 Diamond 

Grit Rating

 140

Diameter 4"
Width 3"

Thickness

 .078"

Specification

 1. For use in PM procedures.

 2. On Process equipment in Wafer Fab, flat panel display, optical component.

Description

 Vacuum Chamber Cleaning ScrubPADS® with 140 Diamond grit abrasive particles for very heavy duty PM procedures. Ideal for cleaning very hard legacy process residue from Ion Implant, Novellus and AMAT HDP CVD and Roth and Rau SiNX CVD tools.

 

  

 

 

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Metal PartsCeramis PartsQuartz Parts
RefurbishmentProfessional Chamber PM Kits

 

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