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Quick Details

  • Place of Origin: Taiwan
  • Brand Name: Foamtec
  • Model Number: HT4513PD-10
  • Feature: Disposable
  • Product Name: Foamtec HT4513PD-10 Abrasive Scrubbing Pads Vacuum Chamber Cleaning
  • Grit Material: Diamond
  • Grit Rating: 1350
  • Diameter: 4"
  • Width: 3"
  • Thickness: .078"

Packaging & Delivery

Packaging Details 10 pcs/Bag
10 Bags/1 Case
Delivery Time 2 months


Product Name

 Foamtec HT4513PD-10 Abrasive Scrubbing Pads Vacuum Chamber Cleaning

Model Number

 HT4513PD-10 - 1350 Diamond Grit ScrubPad®

Grit Material


Grit Rating


Diameter 4"
Width 3"




 1. For use in PM procedures.

 2. On Process equipment in Wafer Fab, flat panel display, optical component.


 Vacuum Chamber Cleaning ScrubPADS® with 1350 Diamond grit abrasive particles for light duty PM procedures. Ideal for final polishing of wafer processing tools including LAM 9600 and 2300 Etch chambers; Hitachi and TEL Etch Chambers; AMAT CVD, PVD and CMP tools such as TxZ, WxZ, DxZ, SinGEN, PolyGEN, Mirra and Reflexion.














Metal PartsCeramis PartsQuartz Parts
RefurbishmentProfessional Chamber PM Kits


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