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Quick Details

  • Place of Origin: Taiwan
  • Brand Name: Foamtec
  • Model Number: HT4513PD-10
  • Feature: Disposable
  • Product Name: Foamtec HT4513PD-10 Abrasive Scrubbing Pads Vacuum Chamber Cleaning
  • Grit Material: Diamond
  • Grit Rating: 1350
  • Diameter: 4"
  • Width: 3"
  • Thickness: .078"

Packaging & Delivery

Packaging Details: 10pcs/Bag
10Bags/1 Case
Delivery Detail: 2 months

 

Product Name

 Foamtec HT4513PD-10 Abrasive Scrubbing Pads Vacuum Chamber Cleaning

Model Number

 HT4513PD-10 - 1350 Diamond Grit ScrubPad®

Grit Material

 Diamond 

Grit Rating

 1350

Diameter 4"
Width 3"

Thickness

 .078"

Specification

 1. For use in PM procedures.

 2. On Process equipment in Wafer Fab, flat panel display, optical component.

Description

 Vacuum Chamber Cleaning ScrubPADS® with 1350 Diamond grit abrasive particles for light duty PM procedures. Ideal for final polishing of wafer processing tools including LAM 9600 and 2300 Etch chambers; Hitachi and TEL Etch Chambers; AMAT CVD, PVD and CMP tools such as TxZ, WxZ, DxZ, SinGEN, PolyGEN, Mirra and Reflexion.

 

 

 

 

 

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Metal PartsCeramis PartsQuartz Parts
RefurbishmentProfessional Chamber PM Kits

 

Transaction History of the Supplier

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Transaction Overview

Transactions

Transaction Details

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